Overhead Hoist Transport

Application background:

The semiconductor OHT (overhead hoist transport) equipment is the core automated handling system in the semiconductor manufacturing process, which realizes the intelligent transportation of key materials such as wafers and chips through elevated tracks. This device can not only improve production efficiency, but also effectively save production space, reduce costs, and provide a solid foundation for the automation integration of the entire production line. However, with the rapid development of the semiconductor manufacturing industry, OHT equipment is facing a series of new challenges and demands in terms of control systems.

Customer requirements:

• Dual drive power mechanism: front wheel drive servo speed mode+rear wheel drive torque mode, requiring dynamic collaborative control;
• Wireless stability: The wireless communication between the OHT vehicle and the upper computer scheduling system, as well as the vehicle control web interface, must be stable and reliable.
• Accurate positioning: OHT vehicles need to accurately identify and locate each workstation to ensure the accuracy of material handling; Meanwhile, by combining CCD secondary scanning with radar detection, the docking height of the workstation is ensured to be precise.
• High security level: dual radar scanning+foreign object detection for emergency stop;

Scenario solution framework:

Characteristics of SINSEGYE's solution

1、Integrated Control and Computation：

The Sinsegye solution reduces the hardware quantity of the control system, saving 30% of hardware costs;

2、Usability&Openness

• Multi protocol support: The SX51 series iComputer is equipped with mainstream protocols such as EtherCAT, CAN, Modbus TCP, etc., allowing for free configuration of network port communication while ensuring communication stability;
• Visual integration: The CCD developed by the customer communicates with the soft PLC through shared memory or ACP. Under the same data support test of the project, the Sinegye solution has improved the Modbus TCP communication rate by 30% compared to the original device solution.

3、Strong security

Each vehicle has an independent program and detection system. The radar detects an abnormality and the vehicle body automatically stops. There is no need to transfer the signal to the dispatch system, as the dispatch system controls the vehicle to stop.