Thin film deposition equipment

Thin film deposition equipment

Thin film deposition equipment is mainly responsible for the deposition of dielectric and metal layers in various process steps, including CVD (chemical vapor deposition), PVD (physical vapor deposition), and ALD (atomic layer deposition), among which ALD belongs to the branch of CVD. According to different deposition processes, thin film deposition equipment is divided into CVD equipment, PVD equipment, and ALD equipment.

Difficulties in the control system of thin film deposition equipment:

1. Multi point temperature control

2. Multi axis motion control

3. Multiple parallel communication buses

4. Data tracking and analysis

5. Standardized management of software versions

6. Stability of control system

7. Functions and performance of the controller

Control system architecture:

Characteristics of SINSEGYE's solution:

1.Integrated Control and Computation

-A SP70iComputer replaces the original upper level industrial control computer+PLC, reducing hardware equipment and lowering hardware costs by more than 50%.

-The data communication between the upper software and the soft PLC is effectively improved through shared memory or ACP, which enhances the speed of data exchange.

-Using virtualization technology, Windows blue screen or restart does not affect the running of real-time tasks.

2. Easy-to-use & Strong scalability

-Integrate multiple industrial communication protocols, supporting DeviceNet, EtherCAT, EtherNet/IP, Modbus, OPC UA 232/485, etc. Facilitate the expansion of system structure and integration with upper level systems.

-Data Analysis: Provides DataScope oscilloscope software for displaying and analyzing variables in automated systems in a graphical manner. Greatly convenient for customers to analyze various application requirements.

-IO version management: For various IO brands and different slave stations, IO version management functions can be provided, allowing customers to easily manage multiple models with the same program. Support the management of EtherCAT and DeviceNet slave stations.

-EtherCAT Master Station: With comprehensive EtherCAT Master Station functions, it has reached the level of top foreign brands.

-Network architecture: Supports EtherCAT ring network redundancy, improves communication stability of EtherCAT network, and enhances device stability.